Scratch resistance and tribological properties of SiOx incorporated diamond-like carbon films deposited by r.f. plasma assisted chemical vapor deposition

N. KumarBarve, S. A.Chopade, S. S.Kar, R.Chand, N.Dash, S.Tyagi, A. K.Patil, D. S.2016-01-152016-01-152015Tribology International, 2015. Vol. 84: pp. 124-131http://hdl.handle.net/123456789/122404120 bytestext/htmlenSiOx:DLCScratch resistanceFrictionWearScratch resistance and tribological properties of SiOx incorporated diamond-like carbon films deposited by r.f. plasma assisted chemical vapor depositionArticle