Influence of ion-to-atom ratio on the microstructure of evaporated molybdenum thin films grown using low energy argon ions

Yadav, P. K.Sant, T.Mukherjee, C.Nayak, M.Rai, S. K.Lodha, G. S.Sharma, S. M.2015-03-092015-03-092014Journal of Vacuum Science & Technology-A, 2014. Vol. 32 (2): Article no. 21509http://hdl.handle.net/123456789/104234432 bytestext/htmlenion-to-atom ratiomicrostructuremolybdenum thin filmslow energy argon ionsInfluence of ion-to-atom ratio on the microstructure of evaporated molybdenum thin films grown using low energy argon ionsArticle