Bhushan, K. G.Mukundhan, R.Gupta, S. K.2014-03-282014-03-282013AIP Conference Proceedings, 2013. Vol. 1512 (1): pp. 680-681http://hdl.handle.net/123456789/90013740 bytestext/htmlenHigh resolution TOF - SIMS depth profilingnano-film multilayersthin film W-C-W multilayer structureroughness model calculationsHigh resolution TOF - SIMS depth profiling of nano-film multilayersArticle