Jagannadha Raju, S. D. V. S.Haque, S. M.Goud, B. K.De, R.Misal, J. S.Rao, K. D.2023-05-232023-05-232022Physica Scripta, 2022. Vol. 97: Article no. 95505http://hdl.handle.net/123456789/258064447 bytestext/htmlenfiber bragg gratingFBG interrogatorPVDmagnetron sputteringmultiplexingFiber Bragg grating sensor for in situ substrate temperature measurement in a magnetron sputtering systemArticle