RF-PACVD of water repellent and protective HMDSO coatings on bell metal surfaces: Correlation between discharge parameters and film properties

Choudhury, A. J.Barve, S. A.Chutia, J.Pal, A. R.Kishore, R.JagannathPande, M.Patil, D. S.2011-10-042011-10-042011Applied Surface Science, 2011. Vol. 257 (20): pp. 8469-8477http://hdl.handle.net/123456789/51684927 bytestext/htmlenRF plasmaPACVDHexamethyldisiloxane (HMDSO)Plasma diagnosticsCorrosion protective coatingsHydrophobic coatingsRF-PACVD of water repellent and protective HMDSO coatings on bell metal surfaces: Correlation between discharge parameters and film propertiesArticle