Barve, S. A.Chopade, S. S.Kar, R.Chand, N.Deo, M. N.Biswas, A.Patel, N. N.Sinha, S.2020-09-142020-09-142017Diamond & Related Materials, 2017. Vol. 71: pp. 63-72http://hdl.handle.net/123456789/205904562 bytestext/htmlenDiamond like carbonDLC-SiOxRF CVDThin filmsSiOx containing diamond like carbon coatings: Effect of substrate bias during depositionArticle