Aerosol assisted chemical vapour deposition of germanium thin films using organogermanium carboxylates as precursors and formation of germania films

Shah, A. Y.Wadawale, A.Sagoria, V. S.Jain, V. K.Betty, C. A.Bhattacharya, S.2013-03-122013-03-122012Bulletin of Materials Science, 2012. Vol. 35 (3): pp. 365-368http://hdl.handle.net/123456789/69974182 bytestext/htmlenOrganogermaniumgermanium thin filmsAACVDXRDAerosol assisted chemical vapour deposition of germanium thin films using organogermanium carboxylates as precursors and formation of germania filmsArticle