Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies

Dey, R. M.Pandey, M.Bhattacharyya, D.Patil, D. S.Kulkarni, S. K.2010-02-022010-02-022007http://hdl.handle.net/123456789/17883898 bytestext/htmlenDiamond like carbon filmsmicrowave assisted CVDX-ray photoelectron spectroscopyspectroscopic ellipsometryDiamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studiesArticle