Yadav, A.Dubey, S.Dubey, R.Subramanyam, N.2021-04-052021-04-052020Materials Today: Proceedings, 2020. Vol. 23: pp. 309-316http://hdl.handle.net/123456789/226764263 bytestext/htmlenSilicon negative ion implantationSEMEDXAFMXRDStudy of Low Energy (50 keV) Silicon Negative ion Implantation in GaAsArticle