Studies of thin films of Ti- Zr -V as non-evaporable getter films prepared by RF sputtering

Gupta, N.JagannathSharma, R. K.Gadkari, S. C.Muthe, K. P.Mukundhan, R.Gupta, S. K.2014-04-072014-04-072013AIP Conference Proceedings, 2013. Vol. 1512 (1): pp. 794-795http://hdl.handle.net/123456789/90214160 bytestext/htmlenthin films studyTi- Zr -Vnon-evaporable getter filmsRF sputteringStudies of thin films of Ti- Zr -V as non-evaporable getter films prepared by RF sputteringArticle