Hydrogen plasma characterization at low pressure in 2.45 GHz electron cyclotron resonance proton ion source

Roychowdhury, P.Mishra, L.Kewlani, H.Gharat, S.2017-09-132017-09-132017IEEE Transactions on Plasma Science, 2017. Vol. 45 (4): pp. 665-671http://hdl.handle.net/123456789/149154700 bytestext/htmlenElectron cyclotron resonance (ECR) ion sourceselectron densityelectron temperaturehydrogen plasmaion fractionHydrogen plasma characterization at low pressure in 2.45 GHz electron cyclotron resonance proton ion sourceArticle