Simulation and experimental study of CVD process for low temperature nanocrystalline silicon carbide coating

Kaushal, A.Prakash; J.Dasgupta; K.Chakravartty, J. K.2017-03-292017-03-292016Nuclear Engineering and Design, 2016. Vol. 303: pp. 122-131http://hdl.handle.net/123456789/143034395 bytestext/htmlenSimulation and experimental studyCVD processlow temperature nanocrystalline silicon carbide coatingcoating techniquenuclear industrySimulation and experimental study of CVD process for low temperature nanocrystalline silicon carbide coatingArticle