Mechanical properties of diamond like carbon coatings prepared by microwave electron cyclotron resonance plasma chemical vapour deposition process

Singh, S. B.Pandey, M.Kishore, R.Ramaseshan, R.Chand, N.Dash, S.Tyagi, A. K.Patil, D. S.2010-07-142010-07-142008http://hdl.handle.net/123456789/29534051 bytestext/htmlenMechanical propertycarbon coatingsmicrowave electron cyclotron resonance plasma chemical vapour deposition processFTIR characterizationMechanical properties of diamond like carbon coatings prepared by microwave electron cyclotron resonance plasma chemical vapour deposition processArticle