In-depth analysis of impurities in HFCVD diamond thin films grown from acetone/hydrogen mixtures

Roy, M.George, V. C.Dua, A. K.2021-08-202021-08-202003Diamond and Related Materials, 2003. Vol. 12 (9): pp. 1569-1575http://hdl.handle.net/123456789/233124121 bytestext/htmlenDiamond filmsHot filament chemical vapor deposition (HFCVD)Acetone–Hydrogen mixturesImpuritiesSecondary ion mass spectrometry (SIMS)Nuclear resonant reaction analysis (NRRA)In-depth analysis of impurities in HFCVD diamond thin films grown from acetone/hydrogen mixturesArticle