Bhattacharya, D.Biswas, A.Bhushan, K. G.Swain, M.Basu, S.2012-03-222012-03-222011AIP Conference Proceedings, 2011. Vol. 1349: pp. 487-488http://hdl.handle.net/123456789/59693786 bytestext/htmlenSputter depositionvacuum instrumentationDesign and development of a D.C. magnetron sputtering system for thin film and multilayer depositionArticle