Influence of impinging ion energy on the bonding and mechanical characteristics of DLC films deposited by microwave ECR plasma CVD

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dc.contributor.authorSingh, S.
dc.contributor.authorPandey, M.
dc.contributor.authorKishore, R.
dc.contributor.authorChand, N.
dc.contributor.authorDash, S.
dc.contributor.authorTyagi, A.
dc.contributor.authorPatil, D.
dc.date.accessioned2010-07-14T08:27:03Z
dc.date.available2010-07-14T08:27:03Z
dc.date.issued2008
dc.format.extent3835 bytes
dc.format.mimetypetext/html
dc.identifier.urihttp://hdl.handle.net/123456789/2956
dc.language.isoenen
dc.subjectimpinging ion energyen
dc.subjectbonding and mechanical characteristicsen
dc.subjectDLC filmsen
dc.subjectmicrowave ECR plasma CVDen
dc.titleInfluence of impinging ion energy on the bonding and mechanical characteristics of DLC films deposited by microwave ECR plasma CVDen
dc.typeArticleen

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