An evaporation system for film deposition using electron beam sources

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dc.contributor.authorMaiti, N.
dc.contributor.authorKarmakar, P.
dc.contributor.authorBarve, U. D.
dc.contributor.authorBapat, A. V.
dc.date.accessioned2010-06-11T07:43:06Z
dc.date.available2010-06-11T07:43:06Z
dc.date.issued2008
dc.format.extent4228 bytes
dc.format.mimetypetext/html
dc.identifier.urihttp://hdl.handle.net/123456789/2564
dc.language.isoenen
dc.subjectEvaporation Systemen
dc.subjectelectron beam physical vapor depositionen
dc.subjectreactive evaporationen
dc.subjectsemiconductorsen
dc.titleAn evaporation system for film deposition using electron beam sourcesen
dc.typeArticleen

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