Diagnostics of downstream microwave electron cyclotron resonance (ECR) plasma

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Date

2010

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Abstract

Description

Keywords

Diagnostics, downstream microwave, electron cyclotron resonance (ECR) plasma, chemical vapour deposition

Source

Journal of Physics-Conference Series, 2010. Vol. 208: pp. 012137 doi: 10.1088/1742-6596/208/1/012137

URI

http://hdl.handle.net/123456789/4830

Collections

2010