Measurement of relative sticking coefficient of nitrogen on Al/Ti in a magnetron sputtering system

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dc.contributor.authorSingh, K.
dc.contributor.authorPatnaik P.
dc.contributor.authorBhaisare D. K.
dc.contributor.authorJagannath
dc.contributor.authorKrishnamurthy N.
dc.contributor.authorSuri A. K.
dc.date.accessioned2012-09-06T05:43:48Z
dc.date.available2012-09-06T05:43:48Z
dc.date.issued2011
dc.format.extent4823 bytes
dc.format.mimetypetext/html
dc.identifier.sourceJournal of Metallurgy and Materials Science, 2011. Vol. 53 (3): pp. 261-268en
dc.identifier.urihttp://hdl.handle.net/123456789/6674
dc.language.isoenen
dc.subjectMagnetron sputteringen
dc.subjectCoatingen
dc.subjectSticking coefficienten
dc.subjectTitaniumen
dc.subjectAluminiumen
dc.titleMeasurement of relative sticking coefficient of nitrogen on Al/Ti in a magnetron sputtering systemen
dc.typeArticleen

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