Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

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dc.contributor.authorSingh, S. B.
dc.contributor.authorPandey, M.
dc.contributor.authorChand, N.
dc.contributor.authorBiswas, A.
dc.contributor.authorBhattacharya, D.
dc.contributor.authorDash, S.
dc.contributor.authorTyagi, A. K.
dc.contributor.authorDey, R. M.
dc.contributor.authorKulkarni, S. K.
dc.contributor.authorPatil, D. S.
dc.date.accessioned2010-07-14T08:08:48Z
dc.date.available2010-07-14T08:08:48Z
dc.date.issued2008
dc.format.extent4240 bytes
dc.format.mimetypetext/html
dc.identifier.urihttp://hdl.handle.net/123456789/2952
dc.language.isoenen
dc.subjectDiamond like carbonen
dc.subjectchemical vapour depositionen
dc.subjectmechanical propertiesen
dc.subjectRaman spectroscopyen
dc.titleOptical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVDen
dc.typeArticleen

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