Tribological properties of hydrogenated boron carbide (BxC:Hy) thin films on stainless steel deposited by RF-PECVD technique

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Date

2020

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Keywords

Tribological property, hydrogenated boron carbide (BxC:Hy), thin films, stainless steel, RF-PECVD technique

Source

EPJ Applied Physics, 2020. Vol. 91: Article no. 21301

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