Interface studies of Mo/Si multilayers with carbon diffusion barrier by grazing incidence extended X-ray absorption fine structure

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Date

2019

Authors

Abharana, N.
Biswas, A.
Sarkar, P.
Rajput, P.
Rajnarayan, D.
Rao, K. D.
Modi, M. H.
Bhattacharyya, D.
Jha, S. N.
Sahoo, N. K.

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Ion beam sputtering, Grazing incidence X-ray reflectivity, Grazing-incidence extended X-ray absoprtion fine structure, Multilayers, Interfaces

Source

Thin Solid Films, 2019. Vol. 673: pp. 126-135

URI

http://hdl.handle.net/123456789/19141

Collections

2019