Generation of vapor and concomitant plasma production in an electron-beam evaporator

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Date

2012

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Keywords

vapor generation, concomitant plasma production, electron-beam evaporator, melting point metals, thin film deposition

Source

Journal of Physics-Conference Series, 2012. Vol. 390 (1): pp. 012049

URI

http://hdl.handle.net/123456789/7138

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2012