Scratch resistance and tribological properties of SiOx incorporated diamond-like carbon films deposited by r.f. plasma assisted chemical vapor deposition
No Thumbnail Available
Click here to download
Date
2015
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
SiOx:DLC, Scratch resistance, Friction, Wear
Source
Tribology International, 2015. Vol. 84: pp. 124-131