Diagnostics of microwave ECR generated plasma: Effect of contaminated reference electrode
dc.contributor.author | Kar, R. | |
dc.contributor.author | Barve, S. A. | |
dc.contributor.author | Singh, S. B. | |
dc.contributor.author | Barve, D. N. | |
dc.contributor.author | Chand, N. | |
dc.contributor.author | Patil, D. S. | |
dc.date.accessioned | 2011-05-25T10:09:19Z | |
dc.date.available | 2011-05-25T10:09:19Z | |
dc.date.issued | 2010 | |
dc.format.extent | 3896 bytes | |
dc.format.mimetype | text/html | |
dc.identifier.source | Vacuum, 2010. Vol. 85 (2): pp. 151-155 | en |
dc.identifier.uri | http://hdl.handle.net/123456789/4740 | |
dc.language.iso | en | en |
dc.subject | Microwave ECR plasma | en |
dc.subject | Plasma diagnostics | en |
dc.subject | Langmuir probes | en |
dc.subject | Plasma parameters | en |
dc.title | Diagnostics of microwave ECR generated plasma: Effect of contaminated reference electrode | en |
dc.type | Article | en |