On-line characterisation of copper vapour evolution from linear vapour source generated using strip electron beam

No Thumbnail Available

Click here to download

0785.html (4.22 KB)

Date

2008

Authors

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

electron beam, physical vapour deposition technique, copper vapour evolution, linear vapour source

Source

URI

http://hdl.handle.net/123456789/2825

Collections

2008