Design and development of Fabry-Perot etalon based color filter using ebeam GLAD technique: Simulation and experiment
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Date
2023
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Abstract
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Keywords
Fabry–Perot Etalon, Spatial variable color filter, E-beam evaporation, Ag/TiO2 thin films, Transmittance, Spectroscopic ellipsometry
Source
Optics Communications, 2023. Vol. 541: Article no. 129551