Surface roughness and interface diffusion studies on thin Mo and W films and Mo/Si and W/Si interfaces

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Date

2003

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Abstract

Description

Keywords

Surface roughness, Interface diffusion, Spectroscopic ellipsometry, SIMS

Source

Applied Surface Science, 2003. Vol. 214: pp. 259-271

URI

http://hdl.handle.net/123456789/23229

Collections

2003