Fiber Bragg grating sensor for in situ substrate temperature measurement in a magnetron sputtering system

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dc.contributor.authorJagannadha Raju, S. D. V. S.
dc.contributor.authorHaque, S. M.
dc.contributor.authorGoud, B. K.
dc.contributor.authorDe, R.
dc.contributor.authorMisal, J. S.
dc.contributor.authorRao, K. D.
dc.date.accessioned2023-05-23T09:49:32Z
dc.date.available2023-05-23T09:49:32Z
dc.date.issued2022
dc.description.divisionA&MPDen
dc.format.extent4447 bytes
dc.format.mimetypetext/html
dc.identifier.sourcePhysica Scripta, 2022. Vol. 97: Article no. 95505en
dc.identifier.urihttp://hdl.handle.net/123456789/25806
dc.language.isoenen
dc.subjectfiber bragg gratingen
dc.subjectFBG interrogatoren
dc.subjectPVDen
dc.subjectmagnetron sputteringen
dc.subjectmultiplexingen
dc.titleFiber Bragg grating sensor for in situ substrate temperature measurement in a magnetron sputtering systemen
dc.typeArticleen

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