RF-PACVD of water repellent and protective HMDSO coatings on bell metal surfaces: Correlation between discharge parameters and film properties
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Date
2011
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Keywords
RF plasma, PACVD, Hexamethyldisiloxane (HMDSO), Plasma diagnostics, Corrosion protective coatings, Hydrophobic coatings
Source
Applied Surface Science, 2011. Vol. 257 (20): pp. 8469-8477