Investigation of Mo/Si and W/Si Interfaces by Phase Modulated Spectroscopic Ellipsometry and Cross-Sectional Transmission Electron Microscopy

Simple item page
dc.contributor.authorBhattacharyya, D.
dc.contributor.authorPoswal, A. K.
dc.contributor.authorDey, G. K.
dc.contributor.authorDas, N. C.
dc.date.accessioned2019-09-24T09:04:01Z
dc.date.available2019-09-24T09:04:01Z
dc.date.issued2004
dc.description.divisionSpect. Div.;MSDen
dc.format.extent4053 bytes
dc.format.mimetypetext/html
dc.identifier.sourceVacuum, 2004. Vol. 76: pp. 31-36en
dc.identifier.urihttp://hdl.handle.net/123456789/19509
dc.language.isoenen
dc.subjectSurface roughnessen
dc.subjectInterface diffusionen
dc.subjectSpectroscopic Ellipsometryen
dc.subjectXTEMen
dc.titleInvestigation of Mo/Si and W/Si Interfaces by Phase Modulated Spectroscopic Ellipsometry and Cross-Sectional Transmission Electron Microscopyen
dc.typeArticleen

Click here to download

Original bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
0136.htm
Size:
3.96 KB
Format:
Hypertext Markup Language
Download
License bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.81 KB
Format:
Item-specific license agreed upon to submission
Description:
Download

Collections

2004