BARC/PUB/2021/0267

 
 

Investigation of soft X-ray optical properties and their correlation with structural characteristics of zirconium oxide thin films

 
     
 
Author(s)

Sinha, M.; Singh, A.; Gupta, R.; Yadav, A. K.; and others
(A&MPD)

Source

Thin Solid Films, 2021. Vol. 721 (1): Article no. 138552

ABSTRACT

Oxide-based compound materials serve as a suitable coating material for soft X-ray optical applications. The optical performances of such materials depend on various properties like oxygen (O)/metal ratio, O-vacancies, defects, and crystallinity. In this study, we have investigated the soft X-ray optical properties and their correlation with structural characteristics of zirconium oxide thin films of thickness ~10 and 50 nm. The soft X-ray optical properties of the films were measured using Indus-2 soft X-ray reflectivity beamline BL-03 covering the O K-edge. To understand the influence of structural parameters, crystallinity, and the local environment of the films on the optical performance, multiple techniques like grazing incidence X-ray reflectivity, diffraction and Extended X-ray Absorption Fine Structure Spectroscopy are used. It was found that a marginal variation in O/Zr ratio, O- vacancies, and a change in distortion and co-ordination number of the Zr-O and Zr-Zr bonding in the two films of different thicknesses does not influence much the behaviour of soft X-ray optical response near O K-edge region. Details of the results are discussed.

 
 
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