Optimization
of deposition parameters of a dc magnetron sputtering system was
performed to obtain good quality multilayer films of Cu/Ti. Two bilayers
of Cu/Ti and Ti/Cu were deposited and characterized by X-Ray
reflectometry (XRR) to obtain the structural parameters like thickness,
roughness and density. Analyses of these XRR data helped optimize
deposition parameters of a Cu/Ti multilayer, which was also
characterized by XRR and found to be of very good reflectance with Bragg
peaks visible up to 4th order. Further the interface asymmetry observed in the bilayers as well as in the multilayer is also presented in this paper.