NEG (Non Evaporable Getters)materials in the form of ternary alloy coatings have many benefits compare to traditional bare surfaces such as Extreme high vacuum(XHV), lower secondary electron yield(SEY), low photon desorption cofficient. The extreme high vacuum (pressure < 10^-10 mbar) is very useful to the study of surfaces of the material, for high energy particle accelerators(LHC, Photon Factories), synchrotrons (ESRF, Ellectra) etc..Low secondary electron yield leads to better beam life time. In LHC the pressure in the interaction region of the two beams is something of the order of 10^-12 mbar. In this paper preparation of the coatings and their characterization to get the Activation temperature by using the surface techniques XPS, SEM and SIMS has been shown.