Alloy steels of type 9Cr1Mo are being developed worldwide for the boiler and turbine components of supercritical and ultra supercritical thermal power plants and for the pressure vessel of fast breeder reactors. These steels exhibit very complex high temperature creep cavitation processes with coupled influences of creep strain, material softening and ageing etc. A new viscoplastic model considering both deformation and damage evolution has been developed in this work to predict high temperature creep deformation and damage of a 9Cr1Mo steel. Smooth tensile specimens have been analysed using this new model and the evolution of creep damage has been predicted. The results have been compared with those of experiment from literature. From the initial results, it is observed that this approach is very promising to carry out design and fitness-for-purpose of service of actual plant components.