BARC/PUB/2017/1228

 
 

Development and characterization of soft X-ray synchrotron mirror

 
     
 
Author(s)

Roy, P. S.; Biswas, A.; Bhattacharya, D.; Sharma, R. K.; Bhattacharyya, D.; Sahoo, N. K.; and others
(A&MPD;SSPD;TPD)

Source

AIP Conference Proceedings, 2017. Vol. 1832: Article no. 060011

ABSTRACT

The 9 meter long indigenously developed in-line magnetron sputtering system has been used to develop Cr/Au based synchrotron mirror, to be used in the soft X-ray wavelength range of 40-250Å in the PASS beamline at INDUS-1 synchrotron source. Initially Cr/Au films of required thickness have been deposited on small c-Si and zerodour substrates and have been characterized by hard X-ray and soft X-ray reflectivity measurements. The deposition parameters of the sputtering system have been optimized and calibrated for depositing Cr and Au thin films of bulk like density, low surface roughness and a 1% thickness uniformity over a length of 1500 mm. The samples deposited under the optimized condition have been found to yield high soft X-ray reflectivity also in the desired wavelength range. Finally Cr/Au soft X-ray mirrors have been deposited under the above optimized conditions on plane (500 mm X 51 mm X 51 mm) and spheroidal (300 mm X 51 mm X 47 mm) zerodour substrates which will be installed in the PASS beamline soon.

 
 
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