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Author(s) |
Balouria, V.; Samanta, S.; Singh, A.; Debnath, A. K.; Mahajan, A.; Bedi, R. K.; Aswal, D. K.; Gupta, S. K. (TPD)
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Source |
Sensors & Actuators-B, 2013. Vol. 176: pp. 38-45 |
ABSTRACT
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The chemiresistive gas sensing characteristics of Co3O4 thin films – prepared by electron-beam deposition of Co films on (0 0 0 1) Al2O3 substrate followed by oxygen annealing at three different temperatures (500oC, 650oC and 800oC) – have been investigated for a host of gases (C2H5OH, CO, NO, Cl2, NH3 and H2S). The results of atomic force microscopy and X-ray diffraction revealed that the grains of these films are composed of nano-crystallites (size: 24–56 nm). X-ray photoelectron spectroscopy data revealed that the content of adsorbed oxygen decreases with increasing annealing temperature. For H2S gas in the concentration range 1–100 ppm, films annealed at 650oC exhibited high selectivity, low base line drift and highest response, which are attributed to small crystallite size, improved crystallinity, better grain-to-grain connectivity and higher adsorbed oxygen content. The H2S sensing mechanism has been explained on the basis of the depletion of chemisorbed oxygen at the film surface. |
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