Sharma, P. K.; Ramgir, N.; Goyal, C. P.; Datta, N.; Kailasaganapathi, S.; Kaur, M.; Debnath, A. K.; Aswal, D. K.; Gupta, S. K. (TPD)
Source
AIP Conference Proceedings, 2013. Vol. 1536: pp. 1229-1230
ABSTRACT
Fabrication of a 2 x 4 multiple sensor array based on SnO2 thin films was demonstrated. SnO2 thin films were deposited on Al2O3 substrates and modified selectively using Au and CuO by sputtering. The sensor array was tested for its gas sensing characteristics towards H2S. The maximum sensor response (S=52) was observed in case of Au modified SnO2 thin films. By the surface modification using Au there is increase in the sensor response at all temperature. With the increase in temperature, sensor response decreases.