BARC/PUB/2012/0475

 
 

Characterization of Ni/Al multilayer on Si substrate by diffraction and reflectometry techniques

 
     
 
Author(s)

Swain, M.; Basu, S.; Bhattacharya, D.; Gupta, M.
(SSPD)

Source

AIP Conference Proceedings, 2012. Vol. 1447: pp. 647-648

ABSTRACT

An ion beam deposited multilayer film of nominal thickness [Ni(200 Å)/Al(100 Å)]×5 on Si substrate has been characterized by X-Ray Diffraction(XRD), X-Ray Reflectivity (XRR) and Polarized neutron reflectivity(PNR). The present paper attempts to identify presence of any intermetallic compounds at the interfaces of the as-deposited sample. Structural parameters obtained from XRR and PNR are close to design values.

 
 
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