Bagwaiya, T.; Goyal, C. P.; Bhattacharya, S.; Ramgir, N. S.; Bhattacharya, D.; Koiry, S. P.; Aswal, D. K.; Gupta, S. K. (TPD;SSPD)
Source
AIP Conference Proceedings, 2014. Vol. 1591: pp. 938-940
ABSTRACT
NiO
thin films prepared by RF sputtering have been investigated for
possible gas sensing application. The sensor films having thickness of
around 30 nm were extremely smooth exhibiting a surface roughness of
~0.7 Å. These films exhibited a highly sensitive and selective response
towards H2S at an operating temperature of 300°C.