An inductively coupled plasma quadrupole mass spectrometer, equipped with a desolvation sample introduction system, was successfully used for the accurate determination of B, AI, P, Ti, Fe, and Cu in silicon powder samples. The effects of the operating conditions of the pneumatic nebulization membrane desolvation sample introduction system were optimized to achieve the best signal-to-background ratio for the elements studied. To avoid the vaporization loss of boron during sample dissolution, mannitol was added to the sample. The method alleviated the effects of polyatomic interferences at m/z 27, 31, 47, 48, 56, and 57 caused by ²⁸Si⁺ spread, ¹⁴N¹⁶0H⁺, ²⁸Si¹⁹F⁺, ²⁹Si¹⁸F⁺, ²⁸Si²⁸Si⁺, and ²⁸Si²⁹Si⁺, respectively. The detection limits were better than 0.02, 0.007,0.1, 0.004, 0.1, and 0.002 ng mL^-1 for B, AI, P, Ti, Fe, and Cu, respectively. The method was applied to the detennination of B, AI, P, Ti, Fe, and Cu in four solar-grade silicon powder samples. The accuracy of the procedure was verified by analyZing certified reference materials NIST SRM 1643e Trace Element in Water for B, AI, Fe, Cu and NIST SRM 2711 Montana Soil for AI, P, Ti, Fe, Cu. The concentrations of B, AI, P, Ti, Fe, and Cu were determined by external calibration with Rh as the internal standard. Good agreement was obtained between the experimental results and the reference values. The precision between the sample replicates was better than 6% for all of the detenninations.