BARC/PUB/2012/0454

 
 

Synthesis and characterization of semiconducting BC films for neutron sensors by pulse DC plasma CVD

 
     
 
Author(s)

Mishra, P.; Ghosh, S. K.; Srivastava, C.; Choudhary, R. K.; Bidaye, A. C.
(MPD)

Source

AIP Conference Proceedings, 2012. Vol. 1451: pp. 118-120

ABSTRACT

Crystalline boron carbide (BC) films were synthesized on n-type Si(111) surface by employing pulse DC plasma chemical vapor deposition (CVD) technique. In the present study, ortho-carborane was used as precursor in order to obtain p-type BC films so that a p-n junction diode is formed. X-ray diffraction of BC films showed well defined crystallized reflections with presence of several boron carbide phases. The measured direct band-gap and resistivity of these films were ~3.2 eV and 75000-100000 Ohm.cm respectively. I-V characteristics of such films confirmed about the formation of p-n junction diode between BC:Si interface with a leakage current of 50 nA at -40 V.

 
 
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