BARC/PUB/2005/0207

 
 

Morphology-dependent electric transport in textured ultrathin Al films grown on Si

 
     
 
Author(s)

Aswal, D. K.; Joshi, N.; Debnath, A. K.; Muthe, K. P.; Gupta, S. K.; Yakhmi, J. V. and others
(TPPED)

Source

Journal of Applied Physics, 2005. Vol. 98: Article no. 026103

ABSTRACT

The thickness and temperature dependence of the electrical resistivity of the 111 textured ultrathin aluminum metal films grown on 111 Si substrates using molecular-beam epitaxy have been investigated. For films with thickness <50 nm, the room-temperature value of resistivity—contrary to the predictions of existing theoretical models—is found to increase monotonically with thickness. In addition, the temperature dependence of these films exhibited a  metal-to-insulator transition at ~110 K. The studies of films using atomic force microscopy, x-ray photoelectron spectroscopy, and x-ray diffraction revealed that the observed anomalous thickness and temperature dependence of resistivity arise due to the formation of two-dimensional network of Al islands, and the low-temperature electric transport of such films could be explained using variable range hopping conduction.

 
 
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