Structural, optical and magnetic properties of oriented Zn_0.95 TM_0.05O(TM = Co, Ni, Cu) films prepared on amorphous quartz substrate using RF magnetron sputtering have been studied. X-ray diffraction patterns show that all films are single phase and are preferably oriented in (002) direction. An analysis of transmission spectra shows that the optical band gap is reduced for all doped ZnO films with respect to that of bulk ZnO single crystal. With increase in thickness of Cu doped ZnO films, the band gap reduces further (3.00 eV for 200 nmfilm and 2.86 eV for 400 nmfilm). A strong absorption is observed at 665 nmfor Co doped ZnO film due to transitions of tetrahedrally coordinated Co²⁺ from ⁴A₂ (⁴F) → ²E (²G). Apre-edge peak observed inTMK-edge XANES spectra of each film confirms thatTMions get substituted in Zn site of ZnO hexagonal wurtzite structure. No room temperature ferromagnetism is observed in any of doped films.